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AMTetcher Email Log
Tuesday, April 14, 2009
Problem amtetcher SNF 2009-04-14 11:44:11: GAS 5 - NF3 gas in Process 3
NF3 gas showing 2 to 3 cc during process 3. Also noticed RF is lower
than usual (only 1042/1012, usually it's around 1185/1150).
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