Comment amtetcher SNF 2008-07-30 11:32:29: Process Quals- again....

ran etchrates for program 3# again on 17 July.
Wafers in position #2 in all six tray for 5 mins.
Average of all wafers = Ox 344A/ min, PR 139A/min, Ox:PR=2.46:1
If you'd like the full data please email me.