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AMTetcher Email Log
Wednesday, May 21, 2008
Comment amtetcher SNF 2008-05-21 09:15:05: Pumpdown update
Replaced the ion gauge. Vented the chamber and had it open for 10 min. Ran recipe #3 (0.5 mT process). It took 3.25 min to go from pressing the RUN button to process start.
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