"FL SNS ALWAYS ON
FIX OR PUSH RUN"
I have 9 wafers in there in the middle of process 4 (time=5.4 min), but I'm not sure where in the etch the power was interrupted. Please e-mail me if you know what the error message means and how to deal with it. Please put wafers in wafer box on top of the machine if you manage to get them out.
Thanks.
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