Tuesday, September 13, 2011

Re: Problem amtetcher SNF 2011-09-10 09:38:46: Process 2 uses NF3 bottle too- consequences

talked with user. He was running a very long etch without polymer removal and got very uneven etching. Advised him to descum every 15-20 mins during the etch.
Also ran a ER check. Results posted in comments.

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