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AMTetcher Email Log
Friday, August 5, 2011
Comment amtetcher SNF 2011-08-05 16:44:20: ASML target program tested (Prog #4)
Prog #4 00:05:00
Average depth = 919A
Si Etch Rate = 184A/min
PR Etch Rate = 268A/min
Time for 1200A etch = 00:06:31
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