Shutdown amtetcher SNF 2011-02-09 20:28:14: sparking in the chamber

I've preinspected the hex rode thorougly before running my process (program #1) which seemed fine. However, upon running the process, I've noticed sparks going on within the holding plate. I've immediately aborted the etch and change to standby program but realized that it would still have the spark happening. Please do not use the system until proper maintenance is performed. Right now the system is vented.