Re: Comment amtetcher SNF 2011-02-10 15:08:54: Arcing in Prgm #1

What you have observed is not arcing but a change in plasma density. These areas of denser plasma sometimes form where there are gaps in the insulation such as the edges and corners of trays, Recipe1 seems to be more susceptible to this because of the chemistry. They should not however, affect your process unless they are extremely intense and remains in one spot. If this is the case, ven the chamber and verify that the tray clamps are properly engaged. If the clamps are OK, exchange the problematic tray with another tray and then re-run the process.