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AMTetcher Email Log
Thursday, February 10, 2011
Comment amtetcher SNF 2011-02-10 18:42:05: #3 PR etch rate
three etching (same wafer, 0.7um PR):
1. 82.56 A/min (5 mins)
2. 57.28 A/min (21.5min)
3. 70.4 A/min (5 mins)
etch rate not stable
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