Wednesday, January 19, 2011
Re: Problem amtetcher SNF 2011-01-18 18:08:13: AMT failure
Adjusted the bell jar lift brakes. Reentered all system parameters and reprogrammed recipes 2 and 3. Need to enter progaramming for all other recipes. Chamber leak rate is 2 mT/min. Cycled the bell jar up and down several times with no problems. Ran standby recipes
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