skip to main
|
skip to sidebar
AMTetcher Email Log
Thursday, January 20, 2011
Comment amtetcher SNF 2011-01-20 13:08:57: #3 Ox etch rate
Seems to be a bit low.
Tray #2 ~ 272 A/min
Gas flows, pressure and power normal. Hex temperature was at 28C at the end of the etch
No comments:
Post a Comment
Newer Post
Older Post
Home
Subscribe to:
Post Comments (Atom)
Problem Categories
Vacuum
Arching
rf generator
Powered-down
Archive
Archive
02/17 - 02/24 (1)
02/10 - 02/17 (14)
02/03 - 02/10 (6)
01/27 - 02/03 (6)
01/20 - 01/27 (16)
01/13 - 01/20 (13)
01/06 - 01/13 (24)
12/30 - 01/06 (2)
12/16 - 12/23 (10)
12/09 - 12/16 (24)
12/02 - 12/09 (34)
11/25 - 12/02 (35)
11/18 - 11/25 (5)
11/11 - 11/18 (10)
11/04 - 11/11 (14)
10/28 - 11/04 (17)
10/21 - 10/28 (22)
10/14 - 10/21 (10)
10/07 - 10/14 (6)
09/30 - 10/07 (12)
09/23 - 09/30 (16)
09/16 - 09/23 (12)
09/09 - 09/16 (22)
09/02 - 09/09 (10)
08/26 - 09/02 (13)
08/19 - 08/26 (25)
08/12 - 08/19 (15)
08/05 - 08/12 (12)
07/29 - 08/05 (12)
07/22 - 07/29 (17)
07/15 - 07/22 (8)
07/08 - 07/15 (6)
07/01 - 07/08 (1)
06/24 - 07/01 (18)
06/17 - 06/24 (21)
06/10 - 06/17 (22)
06/03 - 06/10 (13)
05/27 - 06/03 (10)
05/20 - 05/27 (17)
05/13 - 05/20 (9)
05/06 - 05/13 (18)
04/29 - 05/06 (15)
04/22 - 04/29 (26)
04/15 - 04/22 (14)
04/08 - 04/15 (19)
04/01 - 04/08 (20)
03/25 - 04/01 (4)
03/18 - 03/25 (8)
03/11 - 03/18 (15)
03/04 - 03/11 (17)
02/26 - 03/04 (22)
02/19 - 02/26 (17)
02/12 - 02/19 (23)
02/05 - 02/12 (18)
01/29 - 02/05 (9)
01/22 - 01/29 (5)
01/15 - 01/22 (9)
01/08 - 01/15 (3)
01/01 - 01/08 (1)
12/25 - 01/01 (3)
12/18 - 12/25 (1)
12/11 - 12/18 (18)
12/04 - 12/11 (41)
11/27 - 12/04 (29)
11/20 - 11/27 (11)
11/13 - 11/20 (9)
11/06 - 11/13 (13)
10/30 - 11/06 (11)
10/23 - 10/30 (11)
10/16 - 10/23 (9)
10/09 - 10/16 (9)
10/02 - 10/09 (16)
09/25 - 10/02 (10)
09/18 - 09/25 (7)
09/11 - 09/18 (6)
09/04 - 09/11 (7)
08/28 - 09/04 (10)
08/21 - 08/28 (20)
08/14 - 08/21 (12)
08/07 - 08/14 (7)
07/31 - 08/07 (12)
07/24 - 07/31 (16)
07/17 - 07/24 (11)
07/10 - 07/17 (8)
07/03 - 07/10 (8)
06/26 - 07/03 (18)
06/19 - 06/26 (16)
06/12 - 06/19 (11)
06/05 - 06/12 (22)
05/29 - 06/05 (17)
05/22 - 05/29 (21)
05/15 - 05/22 (15)
05/08 - 05/15 (17)
05/01 - 05/08 (10)
04/24 - 05/01 (12)
04/17 - 04/24 (17)
04/10 - 04/17 (12)
04/03 - 04/10 (14)
03/27 - 04/03 (18)
03/20 - 03/27 (19)
03/13 - 03/20 (11)
03/06 - 03/13 (16)
02/27 - 03/06 (19)
02/20 - 02/27 (14)
02/13 - 02/20 (21)
02/06 - 02/13 (29)
01/30 - 02/06 (20)
01/23 - 01/30 (29)
01/16 - 01/23 (21)
01/09 - 01/16 (23)
01/02 - 01/09 (18)
12/12 - 12/19 (8)
12/05 - 12/12 (35)
11/28 - 12/05 (13)
11/21 - 11/28 (17)
11/14 - 11/21 (13)
11/07 - 11/14 (11)
10/31 - 11/07 (16)
10/24 - 10/31 (15)
10/17 - 10/24 (17)
10/10 - 10/17 (14)
10/03 - 10/10 (8)
09/26 - 10/03 (6)
09/19 - 09/26 (16)
09/12 - 09/19 (12)
09/05 - 09/12 (5)
08/29 - 09/05 (13)
08/22 - 08/29 (13)
08/15 - 08/22 (17)
08/08 - 08/15 (12)
08/01 - 08/08 (10)
07/25 - 08/01 (8)
07/18 - 07/25 (13)
07/11 - 07/18 (19)
07/04 - 07/11 (13)
06/27 - 07/04 (8)
06/20 - 06/27 (10)
06/13 - 06/20 (11)
06/06 - 06/13 (13)
05/30 - 06/06 (14)
05/23 - 05/30 (17)
05/16 - 05/23 (10)
05/09 - 05/16 (10)
05/02 - 05/09 (10)
04/25 - 05/02 (19)
04/18 - 04/25 (10)
04/11 - 04/18 (20)
04/04 - 04/11 (23)
03/28 - 04/04 (14)
03/21 - 03/28 (10)
03/14 - 03/21 (5)
03/07 - 03/14 (16)
02/28 - 03/07 (33)
02/21 - 02/28 (21)
02/14 - 02/21 (30)
02/07 - 02/14 (12)
01/31 - 02/07 (11)
01/24 - 01/31 (16)
01/17 - 01/24 (15)
01/10 - 01/17 (14)
01/03 - 01/10 (9)
12/27 - 01/03 (2)
12/20 - 12/27 (2)
12/13 - 12/20 (16)
12/06 - 12/13 (27)
11/29 - 12/06 (12)
11/22 - 11/29 (4)
11/15 - 11/22 (20)
11/08 - 11/15 (19)
11/01 - 11/08 (15)
10/25 - 11/01 (8)
10/18 - 10/25 (13)
10/11 - 10/18 (22)
10/04 - 10/11 (13)
09/27 - 10/04 (16)
09/20 - 09/27 (13)
09/13 - 09/20 (19)
09/06 - 09/13 (17)
08/30 - 09/06 (20)
08/23 - 08/30 (12)
08/16 - 08/23 (9)
08/09 - 08/16 (21)
08/02 - 08/09 (26)
07/26 - 08/02 (5)
07/19 - 07/26 (17)
07/12 - 07/19 (9)
07/05 - 07/12 (8)
06/28 - 07/05 (7)
06/21 - 06/28 (15)
06/14 - 06/21 (9)
06/07 - 06/14 (24)
05/31 - 06/07 (38)
05/24 - 05/31 (8)
05/17 - 05/24 (25)
05/10 - 05/17 (14)
05/03 - 05/10 (6)
04/26 - 05/03 (4)
04/19 - 04/26 (12)
04/12 - 04/19 (22)
04/05 - 04/12 (15)
03/29 - 04/05 (8)
03/22 - 03/29 (8)
03/15 - 03/22 (13)
03/08 - 03/15 (8)
03/01 - 03/08 (23)
02/22 - 03/01 (17)
02/15 - 02/22 (10)
02/08 - 02/15 (18)
02/01 - 02/08 (12)
01/25 - 02/01 (8)
01/18 - 01/25 (15)
01/11 - 01/18 (7)
01/04 - 01/11 (11)
12/21 - 12/28 (1)
12/14 - 12/21 (11)
12/07 - 12/14 (14)
11/30 - 12/07 (11)
11/23 - 11/30 (9)
11/16 - 11/23 (19)
11/09 - 11/16 (5)
11/02 - 11/09 (14)
10/26 - 11/02 (13)
10/19 - 10/26 (24)
10/12 - 10/19 (8)
10/05 - 10/12 (12)
09/28 - 10/05 (8)
09/21 - 09/28 (31)
09/14 - 09/21 (31)
09/07 - 09/14 (20)
08/31 - 09/07 (24)
08/24 - 08/31 (18)
08/17 - 08/24 (18)
08/10 - 08/17 (17)
08/03 - 08/10 (30)
07/27 - 08/03 (31)
07/20 - 07/27 (23)
07/13 - 07/20 (48)
07/06 - 07/13 (29)
06/29 - 07/06 (15)
06/22 - 06/29 (10)
06/15 - 06/22 (17)
06/08 - 06/15 (28)
06/01 - 06/08 (19)
05/25 - 06/01 (16)
05/18 - 05/25 (39)
05/11 - 05/18 (27)
05/04 - 05/11 (9)
04/27 - 05/04 (16)
04/20 - 04/27 (20)
04/13 - 04/20 (16)
04/06 - 04/13 (19)
03/30 - 04/06 (19)
03/23 - 03/30 (15)
03/16 - 03/23 (8)
03/09 - 03/16 (12)
03/02 - 03/09 (25)
02/24 - 03/02 (31)
02/17 - 02/24 (27)
02/10 - 02/17 (32)
02/03 - 02/10 (17)
01/27 - 02/03 (11)
01/20 - 01/27 (21)
01/13 - 01/20 (9)
01/06 - 01/13 (15)
12/30 - 01/06 (6)
12/23 - 12/30 (1)
12/16 - 12/23 (9)
12/09 - 12/16 (20)
12/02 - 12/09 (12)
11/25 - 12/02 (1)
11/18 - 11/25 (1)
10/21 - 10/28 (2)
10/14 - 10/21 (7)
10/07 - 10/14 (2)
09/30 - 10/07 (11)
12/29 - 01/05 (1)
08/27 - 09/03 (1)
No comments:
Post a Comment