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AMTetcher Email Log
Wednesday, November 10, 2010
Comment amtetcher SNF 2010-11-10 16:16:05: Prog#4 with increased CM pressure
Ran the program for 5 mins at 50mT (instead of 49mT) Results;
Si etch = 749A (150A/min)
PR ER = 152A/min
Slightly worse than 11/09/10
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