Problem amtetcher SNF 2010-10-18 11:44:41: Please monitor your etch rates!

A user reported (not on Coral, darn it) unusually low oxide etch rates for etch done Thursday. Cesar checked the system this morning and found that the gas tubes were off-alignment. He aligned them. The system is reserved for etch rate checks tomorrow. In the meantime, please be aware that the etch rates may have changed - you may want to monitor your process accordingly or postpone your critical etch until the system has been checked. Today's users: please report your results (karthikv?)