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AMTetcher Email Log
Monday, October 18, 2010
Comment amtetcher SNF 2010-10-18 15:49:38: process #4 etch rate
etched 2 wafers using process #4 on 2010/10/10 for 6*20 min cycles, for an etch depth of 1.6 um (~133 A/min),
SPR 220-7 consumed was 3 um (~250 A/min)
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