Comment amtetcher SNF 2009-07-20 01:30:35:

I have used 2nd, 3rd, 4th, 5th trays for my silicon etch process. Before doing main etch, I have done seasoning etch process and then run 2 batches without unusual thing. The only recipe change that I made is pressure from 40 to 20. I think I might have inspected the trays with special care....... found nothing unusual.... After my silicon etch, I have run program 2. I hope above description will help find out cause and solve theprobelm. Also let me know if I did something wrong.