Re: Problem amtetcher SNF 2009-06-17 11:37:14: Etch nonuniform, etch rate inconsistent

I ran one wafer in each tray in the #2 position and measured five pionts per wafer. The results are within the +/- 5% variation in a wafer.
The resutls are posted on the wiki. I will post a summary in comments.
During the run both SF6 and NF3 showed 1sccm. We believe this to be a false reading as those MFC's are defective.