Re: Comment amtetcher SNF 2009-06-04 12:34:55: Update Gas 5 and SF6 problem

Replaced gas 5 MFC (NF3) and SF6 MFC but NF3 is still not shutting off in time and SF6 is still not flowing. We have ordered rebuild kits for the obselete pneumatic gas shut-off valves. They should be here next week.