Problem amtetcher SNF 2009-05-22 16:04:51: Still no SF6

I tried running a recipe involving O2 and SF6 again: as before (May 7th), the SF6 flow remains at zero during the "wait flow" stage, although oxygen stabilised as normal. Has any progress been made in tracking down the reason for this? Have any labmembers successfully used SF6 in amtetcher?