Re: Problem amtetcher SNF 2008-12-11 14:51:12: gas valve 5 won't close

Reduced NF3 gas line pressure from 27 psi to 15 psi. Before the pressure reduction the gas flow (when valve is closed) was not able to pump out to 0 sccm after 1.5 min. With the reduced pressure, the gas flow goes to 0 in 0.5 min.