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AMTetcher Email Log
Thursday, January 15, 2009
Comment amtetcher SNF 2009-01-15 00:40:28: Fast etch rate Pgm 3 Thermal SiO2
Three test runs: 2 min = 425A/min; 5 min = 421 A/min; 10 min = 420 A/min. Stable press, temp, gas and power values. See me for details.
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