Problem amtetcher SNF 2008-09-17 13:30:24: 3rd report of low ER

This time the etch rate for prog #4 is half of what it was.
I ran a 1200A ASML (for 11 mins) and monitored the etch closely. Every thing was fine except the power. It started lower than usual (about 1050W) and went down to 980W. I recall it used to be a steady 1135W.