Ran a second leak rate test after 1 hour of pumping on the chamber. Leak rate was 15 mT/min. The system is acting like it has a virtual leak (trapped volume).
Extended the turbo pump time to 20 minutes. When I ran recipe 3, the system pumped down to 0.49 mT in 16 minutes. My previous attemp at running recipe 3, the pressure was at 0.64 mT after 45 minutes of pumping. Need to troubleshoot further tomorrow.
Monday, July 21, 2008
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