Tuesday, July 1, 2008

Problem amtetcher SNF 2008-07-01 11:12:55: Turbo pumpdn long- ig?

The previous reporter is correct- third time is a charm. It has taken 20 mins for the ion gauge to get to 0.5mt at about .01mt/2mins. The chamber pressure got to the required .5mt in about 3 mins. Something going on with the ig?

No comments: