Comment amtetcher SNF 2008-07-09 09:42:41: Etchrates for Ox- 1 July

I ran etchrates for program 3# on 1 July.
Wafers in position #2 in all six tray for 5 mins.
Average of all wafers = Ox 357A/ min, PR 138A/min, Ox:PR=2.6:1
If you'd like the full data please email me.