Re: Problem amtetcher SNF 2008-05-15 23:55:09: LEAK: unable to pump down to base

Ran recipe 3. Turbo pumpdown time was 3.75 min to reach 0.5 mT. Ran 3 chamber leak rates. First test: ion gauge valve open, final valve (gas manifold) closed--- leak rate = 9.5 mT/min. Second test: ion gauge valve closed, final valve closed-- leak rate= 8.9 mT/min. Third test: ion gauge open, final valve open (did not open valves to MFCs)-- leak rate= 12.5 mT/min.