Tuesday, May 27, 2008

Comment amtetcher SNF 2008-05-27 10:11:21: Ion gauge, pumpdown

Left chamber open for 1 hour. Ran recipe 3 (0.5 mT press). Chamber reached 0.49 mT in 7.25 minu. Also ran recipe 2, 2 times with no problems. Did not observe the reported ion gauge failure.

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