And welcome back! Just a reminder that the lab opens for business
tomorrow, Friday, Jan. 4, at 7 am. If you plan to get an early start
for the year, please be aware of the following:
*Make sure to review Coral messages before using equipment*.
Startup/process quals for some tools may be delayed: make sure to check
the tool status before running your wafers. Consult Staff if you have
any questions.
*svgcoat/svgcoat2* - These tracks were upgraded with a new PC
interface. New procedures are being posted. Please consult with Gary,
Mahnaz, and Uli, who will be on-hand from 7 am Friday to retrain anyone
needing it. Recipes are being requalified one at a time -- check recipe
status on Coral. Please be aware that many software and hardware
changes are still underway -- if you have any problems, log them on
Coral so that they can be addressed as soon as possible (while the
vendors are still here!)
*Lab Cleanup 2007:* As part of the lab cleanup, all personal items left
outside lab bins during shutdown were collected, removed from the lab,
and placed in storage. If you are missing wafers or other personal
items, please contact a Staff member.
.... and while most of us were off enjoying the holidays, the Facilities
and SNF Maintenance staff were hard at work, performing annual
preventive maintenance (Mike D, Jim H, Cesar & Mario) and other repairs.
Some notable activities this shutdown included: a complete functional
checkout of the Toxic Gas Alarm system (special thanks to Leonard, Ray
and Ted); upgrade of the liquid nitrogen vaporizer and purifier (kudos
to Ted and Air Products for the smoothest installation ever); upgrade of
the ASML (thanks Gary S, and the ASML team [Binder, Alex, Michael,
Linda]); new wbgeneral shelving (Dave, Ed, Uli); new EVG aligner (Gary
S, Mahnaz); major SVGcoat recipe manager upgrade (Gary S, Mahnaz);
rebuild of the STS dep tool (Jim); new network switches and OS upgrades
for SNF servers (John.)
Happy processing!
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
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